Analysis of De-Laval nozzle designs employed for plasma figuring of surfaces

Plasma figuring is a dwell time fabrication process that uses a locally delivered chemical reaction through means of an inductively coupled plasma (ICP) torch to correct surface figure errors. This paper presents two investigations for a high temperature jet (5000 K) that is used in the context of the plasma figuring process. Firstly, an investigation focuses on the aerodynamic properties of this jet that streamed through the plasma torch De-Laval nozzle and impinged optical surfaces. Secondly, the work highlights quantitatively the effects of changing the distance between the processed surface and nozzle outlet. In both investigations, results of numerical models and experiments were correlated. The authors’ modelling approach is based on computational fluid dynamics (CFD). The model is specifically created for this harsh environment. Designated areas of interests in the model domain are the nozzle convergent-divergent and the impinged substrate regions. Strong correlations are highlighted between the gas flow velocity near the surface and material removal footprint profiles. In conclusion, the CFD model supports the optimization of an ICP torch design to fulfil the demand for the correction of ultra-precision surfaces

CFD analysis of an enhanced nozzle designed for plasma figuring of large optical surfaces

For addressing the correction of Mid Spatial Frequency (MSF) errors on metre scale optical surfaces induced by sub aperture figuring process, a new generation of non-contact plasma based surface figuring tools has been created at Cranfield University. In this context, this paper presents an investigation that focuses on novel enhanced nozzles that were created for a Radio Frequency (RF) Inductively Coupled Plasma (ICP) torch. The characteristics of plasma jet delivered by prototype nozzle and a selected enhanced nozzle are compared using an in-house created CFD model. The enhanced nozzle design is based on the results previously obtained throughout a numerical analysis that enabled to identify the key design aspects of these nozzles. This enhanced nozzle is predicted to provide 12.5% smaller footprint and 15.5% higher temperature

Fast figuring of large optics by reactive atom plasma

The next generation of ground-based astronomical observatories will require fabrication and maintenance of extremely large segmented mirrors tens of meters in diameter. At present, the large production of segments required by projects like E-ELT and TMT poses time frames and costs feasibility questions. This is principally due to a bottleneck stage in the optical fabrication chain: the final figuring step. State-of-the-art figure correction techniques, so far, have failed to meet the needs of the astronomical community for mass production of large, ultra-precise optical surfaces. In this context, Reactive Atom Plasma (RAP) is proposed as a candidate figuring process that combines nanometer level accuracy with high material removal rates. RAP is a form of plasma enhanced chemical etching at atmospheric pressure based on Inductively Coupled Plasma technology. The rapid figuring capability of the RAP process has already been proven on medium sized optical surfaces made of silicon based materials. In this paper, the figure correction of a 3 meters radius of curvature, 400 mm diameter spherical ULE mirror is presented. This work demonstrates the large scale figuring capability of the Reactive Atom Plasma process. The figuring is carried out by applying an in-house developed procedure that promotes rapid convergence. A 2.3 μm p-v initial figure error is removed within three iterations, for a total processing time of 2.5 hours. The same surface is then re-polished and the residual error corrected again down to& lambda;/20 nm rms. These results highlight the possibility of figuring a metre-class mirror in about ten hours

Investigation of power dissipation in a collimated energy beam

To satisfy the worldwide demand for large ultra-precision optical surfaces, a fast process chain - grinding, polishing and plasma figuring- has been established by the Precision Engineering Institute at Cranfield University. The focus of Cranfield Plasma Figuring team is the creation of next generation of highly collimated energy beam for plasma figuring. Currently, plasma figuring has the capability to shorten processing duration for the correction of metre-scale optical surfaces. High form accuracy can be achieved (e.g. 2.5 hours and 31 nm RMS for 400mm diameter surface). However, it is known that Mid Spatial Frequency (MSF) surface errors are induced when the plasma figuring process is carried out. The work discussed in this paper deals with the characterisation of highly collimated plasma jets delivered by the Inductively Coupled Plasma (ICP) torches. Also a computational fluid dynamics (CFD) model is introduced. This model is used to assess the behaviour of the plasma jet within the best known processing condition. Finally temperature measurement experiments were performed to determine the energy dissipated values that characterise best the ICP torch coil and its De-Laval nozzle

Reactive Atom Plasma (RAP) figuring machine for meter class optical surfaces

A new surface figuring machine called Helios 1200 is presented in this paper. It is designed for the figuring of meter sized optical surfaces with form accuracy correction capability better than 20 nm rms within a reduced number of iterations. Unlike other large figuring facilities using energy beams, Helios 1200 operates a plasma torch at atmospheric pressure, offers a high material removal rate, and a relatively low running cost. This facility is ideal to process large optical components, lightweight optics, silicon based and difficult to machine materials, aspheric, and free form surfaces. Also, the surfaces processed by the reactive atom plasma (RAP) are easy to fine polish through hand conventional sub-aperture polishing techniques. These unique combined features lead to a new capability for the fabrication of optical components opening up novel design possibilities for optical engineers. The key technical features of this large RAP machine are fast figuring capabilities, non-contact material removal tool, the use of a near Gaussian footprint energy beam, and a proven tool path strategy for the management of the heat transfer. Helios 1200 complies with the European machine safety standard and can be used with different types of reactive gases using either fluorine or chlorine compounds. In this paper, first the need for large optical component is discussed. Then, the RAP facility is described: radio frequency R.F generator, plasma torch, and 3 axis computer numerically controlled motion system. Both the machine design and the performance of the RAP tool is assessed under specific production conditions and in the context of meter class mirror and lens fabrication

Recent patents on in-plane permeability measurement of LCM composite reinforcements

International audienceOptimization of Liquid Composite Molding (LCM) processes using Darcy flow numerical simulation requires inputting accurate reinforcement permeability data. Historically introduced by its author to describe infiltration phenomenon, permeability coming from Darcy's law is usually used in LCM processes as a rheological parameter in order to predict the macroscopic resin motion during the filling stage. Resulting from the flow through a complex fibrous architecture, its measurement is very sensitive to the test conditions due to the high filaments flexibility and meso-structure heterogeneity. Reinforcements are currently anisotropic fibrous media and their in-plane permeability measurement requires specific facilities. Measurements can be performed in transient or steady state conditions, and in one-, two-or three-dimensional configurations. This paper describes the different existing experimental configurations, identification procedures and instrumentation techniques. Advantages and drawbacks of each method are discussed, in the particular case of 2D transient measurements, which are the most representative of Resin Transfer Molding process. Two recent patents using different instrumentation techniques are detailed. They are focused on the simultaneous identification of the in-plane principal permeability values in an anisotropic fibrous reinforcement. Some perspectives are suggested to improve the repeatability of such measurement results

Microwaves enable activated plasma figuring for ultra-precision fabrication of optics

Activated plasma figuring using microwaves aims at providing highly efficient activated energy beams for rapid fabrication of optics. The chemical nature of this type of energy beam leads to targeting silicon-based materials. Furthermore this technology is proposed to address the needs of ultra-precision optical components. In this paper, we present a novel ADTEC microwavegenerated plasma torch design which is operated at atmospheric pressure. In this study, the plasma torch is fed with either argon or helium carrier gas. However this novel design for Plasma Figuring is targeted at local surface correction of crystal quartz which is a material of great interest for optical systems, such as acousto-optic devices. Also this novel design is targeted at reducing midspatial frequency errors such as waviness, ripple errors and residual sub-aperture tool footprints. These are responsible for the scattering of light at small angles, resulting in optical hazing effects, photonic energy loss and pixel cross-talk. Also the results of a preliminary investigation using Optical Emission Spectroscopy (OES) are reported and discussed. These results show the operat ing range when the main processing parameters are changed: microwave forward power values, gas flow rates and the types of gasses

Creation of a control system for plasma delivery to increase determinism and robustness while processing using an ICP torch

International audienceThe Cranfield University Precision Engineering Institute team has created a unique plasma figuring capability to correct large optical surfaces at atmospheric pressure. In the context of ever increasing dimensions of optical components, there is a need for improving the robustness and securing the performance of our Plasma Delivery System (PDS). The current PDS is based on an inductive output L type RF circuit, Inductively Coupled Plasma (ICP) torch and computer numerically controlled (CNC) motion system. The combination of optical component surface areas and the nature of the sub-aperture plasma tool lead to significant processing duration. This atmospheric pressure processing environment is more cost-effective than vacuum chamber based ones which are often used by competitors. However it requires deep awareness and fine understanding of technologies used. Based on the knowledge acquired for the past eight years, we have created a smart control system for our unique PDS that equips a machine called Helios1200. This novel control system aims at securing the process determinism and assisting the machine operator by tuning some key electrical components of the RF network and monitoring some processing parameters. Furthermore, specific assistance is provided during the different phases of the plasma processing. This paper describes the main design aspects

Numerical and experimental modal analysis applied to an optical test system designed for the form measurements of metre-scale optics

The work focuses on the structural design and performances of a unique optical test system (OTS) used for measuring metre-scale optical surfaces. The investigation was carried out through a modal analysis. Two sets of results are presented. Both modal analysis of the entire OTS and transmissibility function related to its use as an optical system are carried out and analysed. The OTS is used for the measurements of the form accuracy at nanometre level of metre-scale concave surfaces. The OTS is a four and half-metre-tall mechanical structure made of bolted aluminium profiles, two structural platens, two dedicated precision positioning supports, a test piece, and a state-of-the-art laser interferometer. The OTS was numerically modelled and fully instrumented with triaxial accelerometers. The results of the modal analysis highlight the natural modes of the entire OTS. Both numerical and experimental methods are designed. The investigation methods are iterative. Indeed, a preliminary numerical model is created using finite element analysis (FEA). FEA results enable the determination of the dynamic range and suitable locations of accelerometers that are mounted onto the OTS for the experimental validation of the FEA model and further to carry out the transmissibility study. Natural frequencies, damping ratios, and mode shape values are obtained and scrutinized. These results are used for refining the FEA model. In fact, the lack of symmetry and the use of feet are identified as the key design feature that affects the OTS. The correlation between experimental and numerical results is within five percent for the first four modes. The results of the transmissibility study highlight the specific natural modes that influence the OTS measurement capability. Overall, the study enables to guide engineers and researchers towards a robust design using a validated and methodical approach

Design of a motorised plasma delivery system for ultra-precision large optical fabrication

A unique plasma figuring (PF) process was created and demonstrated at Cranfield University for manufacturing extremely large telescopes. The atmospheric pressure processing is faster and more cost-effective than other finishing processes; thus, providing an important alternative for large optical surfaces. The industrial scale manufacturing of thousands of ultra-precision metre-scale optics requires a robust PF machine: this requirement is achieved by making the plasma delivery system (PDS) performance repeatable. In this study, a dedicated PDS for large optical manufacturing was proposed to meet the industrial requirement. The PDS is based on an L-type radiofrequency (RF) network, a power supply, and an inductively coupled plasma torch. However, the complexities of these technologies require an in depth understanding of the integrated components that from the PDS. A smart control system for the modified PDS was created. This novel control system aims to make the characterization process deterministic: by automating the tuning of critical electrical components in the RF network, which is achieved by the use of in-line metrology. This paper describes the main design aspects. The PDS was tested with a good correlation between capacitance and RF frequencies. The robust PDS design enables a stable discharge of plasma with a low deviation of RF signals during the total 15 hours' te